As a patented technology independently developed by Daekhon Corporation,
PMS can precisely control multiple carriers both simultaneously and individually while minimizing particle generation from movement
in high vacuum environments, leveraging over 25 years of experience and expertise in motion control.
(Patent registered on Oct. 9, 2012)
PMS is an essential motion solution for improving productivity and yield in critical processes under vacuum,
including OLED, LCD, semiconductor, and solar energy.